Things to keep in mind when referring to this chemical compatibility guideChemical resistance information is based on data provided by testing done under laboratory conditions. x]6}WV5!QCZ}6&J^zee_ Q$qI4pW dH/~(7-mWj7?> Make sure your components are operational before they enter the field. Microchem PMMA Datasheet, 2001. PMMA - Datasheet www.emresist.com Page 1 of 5 Media House Adlington SK10 4NL United Kingdom +44 (0) 1625 813723 info@emresist.com PMMA Resist - Datasheet Features Introduction Film Thickness: 0.5 - 5 m Industry Standard High Resolution Versatile PMMA (polymethyl methacrylate is a widely used, versatile, positive tone The microfab stocks only PMMA 950K A2 and A4. Your request for this product. 4 0 obj endobj 0000002310 00000 n 0000036329 00000 n uvU7Sl=;2 N[L`\#!Eh4r{e Advantages and Limitations of Acrylic Plastic, PMMA or Acrylic: Guide to Support Your Future Transparent Developments, Structure of PMMA Monomer- Methyl Methacrylate, 2 Comments on "PMMA or Acrylic: Guide to Support Your Future Transparent Developments". Suitable for decorating. The time depends on the resist thickness and the size of the patterns. Acrylic is tough, durable, easy to shape and relatively inexpensive. Technical Datasheet | Supplied by Roehm ACRYLITE Resist AG 100 is an impact-modified, completely recyclable polymethyl methacrylate (PMMA) grade by Roehm. x]r8;UMH4CPzc(eIjF*=o5-2AHZGX*eg?777j{sxeOEU4gnyO O)aC]ZZW(m yky| VZ} }?3:ji):{^P.Eu8Uk]vn`9o')6R5.k_'R7z`V)TVaUi58idiU{s(uM;\Dn"53e[kRSc*]OEcWaVVqh*j\k;mDuvB>Ww}=C"f.fjEo5`qe{(e8}He[p[0x 3lC.\IY6B~PBQ hZV?rE]Y}'|F=E~[rws7Z8q3KG3K7%gdcYm`C(h@q^|k7tp@U0Ol6(YsNn@>]'n> ]^~{aw;>[Jk@VjQysl}#\w'EtX~mnqL&phPnD^$pec W-9Y2WZ"H%lY%T {mT:h;PhG+s1dFjf*N`I B-gy&P3%{), 4{c*`WUk8!B8^G1XM@PGb7]jKvyd3T-dyD b pF^Xw(1-JY2u$R. 0000036197 00000 n PMMA Datasheet Extruded Polymethyl-Methacrylate General properties Excellent transparency with a light transmission of 92%. 5?VyQ[fq5ZoZGG3F s88cYw,z!=I#9JR M.,pNxG4`=h7e3/v [ y3C3FHf2 Od{-}2jPHpIu; 87mp4j%$e+}xr8)u%/_njaUKJ]&5ywb>N(EUJpPIVMAo.WPL NR!bN"xNJ1&,oSx3u1`V?k+fAJ|wk"k# or ; Gxycm'2+u8uPm?4$ml_6*ejVhF- 6[d#[\=Nd2{T|5|/gKheSXqS"0([lhF~k3GY^t_n@a]mZ,~aTIqGClUhs;!Ui'k+`W?VZ3mUAQC93D=zLE}(h`vl <> Exposure causes scission of the polymer chains. PMMA 950K Typical Process Parameters 1. 0000009710 00000 n fo` i]UvVjX2J= agxutv,}IKzwJt`w#EF-0yBrL,&^7QR%`4sc*^AJO=3A) gs!H_7}\}5J( 1)##L GJdxmN+KbSqw:7#cfmU@PV]mfBdbv1Qo+t]CtZSf+]\QA#`lS^3!UGsXfk4V{XE),s1vqhTo4R`1XVJ' 2pTi{XR$/H55F$EQTn0h1Fjd1eb*w;IGnC&6$F)^JpiJs QbT 4 0 obj deposited materials. PVDF resin formulations differDifferences in PVDF resins and components made from them can vary because of variations in processing method, compounding, component dimensions and shapes and other variables. 4 0 obj Redirecting. Makes it possible to manufacture transparent parts for hot & humid environments, Realizes light effects via direct or edge lighting in combination with extended impact performance. <> They are suitable for extruding and coextruding profiles and sheets as well as for injection molded formed parts. top-imaging resist: g-, i-line, DUV, 193nm & e-beam. Exposure causes scission of the polymer chains. Characterisation. *tNXz=F.OL:L+npB!4^&v>o@MtHL7o-7E"Xk s1/Hu[,;\h$hDoWy-Jhym:..RtOAoz c7 `4WiC68[i5mPpTf;2R V +6eYj$k9Xe#,;YM\O 0^ Dr!68 f5kV"cY4\.NkpslU.PH[0m[!3g{aq(M=bY\?8sQj.]jJeSJ7fVZ}J-N0? Removal rates increase dramatically with temperature. Label the container and keep it at room temperature. The cookie is used to store the user consent for the cookies in the category "Other. In the single layer PMMA process, typically a single layer of PMMA 950K is spun onto the substrate and exposed, as shown in Fig 1a). Stress CrackingCertain combinations of chemical exposure and mechanical stress can also cause environmental stress cracking. Copolymer resists are based on a mixture of PMMA and ~8.5% methacrylic acid. Put the PMMA bottle back into the fridge. Learn more details about the properties of acrylic (PMMA) plastic at Polymethyl methacrylate Properties and Their Values by SpecialChem. 0000044323 00000 n XYC^2&|2Apf{}HCq? U`#S sN{ They are suitable for extruding and coextruding profiles and sheets as well as for injection molded formed parts. 0000000956 00000 n <>>> ACRYLITE Resist AG 100 is available as PLEXIGLAS Resist AG 100 in European, Asian, African and Australian continents. 1 0 obj You also have the option to opt-out of these cookies. It is resistant to most detergents, inorganic chemicals, aliphatic hydrocarbons, fats and oils, diluted acids and concentrated alkalis at room temperature. % High resistance to UV light and weathering, Limited chemical resistance, prone to attack by organic solvents, High injection pressures are needed because of poor flow properties and it may be necessary to inject slowly to get the correct flow, Internal stresses can be eliminated by heating at 80C, A degassing screw with an L/D ratio of 20-30 is recommended. Functional cookies help to perform certain functionalities like sharing the content of the website on social media platforms, collect feedbacks, and other third-party features. % <> PMMA Data Sheet of 8 PMMA (polymethyl methacrylate) is a versatile polymeric material that is well suited for many imaging and non-imaging microelectronic applications. Selrico Communications is quoting a project and are in need of a quote from your company PMMA equipment. 0000004116 00000 n These impact-modified PMMA grades are used when applications require the benefits of PMMA in combination with improved crack resistance. The cookie is set by GDPR cookie consent to record the user consent for the cookies in the category "Functional". Acrylics are generally not recommended for use with. qviQ,DTmZ>!,6egEQ2mZAd0gIV]Vt+l`65 6j|"=gV'%hB4fRIXy Surface upgrading with PLEXIGLAS molding compound protects the new GEALAN-KUBUS window and balcony door system against all kinds of weather, and enables modern building design. Spin coat PMMA with one of the Laurell programs between E and H, according to the table at the end of the page. PMMA is also used as a protective coating for wafer thinning, as a bonding adhesive and as a sacrificial layer. Apart from reducing vehicle weight, injection molded glazing offers maximum freedom of design and functional integration, such as the integration of lighting or panel trim. endobj a resist is a thin layer used to transfer a circuit pattern to the semiconductor substrate which it is deposited upon. Real mould ability. These cookies will be stored in your browser only with your consent. 3 0 obj Acrylic (PMMA) chemical resistanceIn general, acrylics are unaffected by laboratory chemical solutions where water is the solvent. Acrylic (PMMA) biocompatibility PMMA is very biocompatible with human tissue. Electron beam exposure breaks the polymer into fragments that are dissolved preferentially by a developer such as MIBK. Microchem 495 PMMA resist. These cookies help provide information on metrics the number of visitors, bounce rate, traffic source, etc. This is usually done using immersion testing on unstressed material samples. The following table gives thicknesses vs. speed measured at the center of silicon samples of 1x1 cm. High gloss and colorless. <>/ExtGState<>/ProcSet[/PDF/Text/ImageB/ImageC/ImageI] >>/Annots[ 14 0 R] /MediaBox[ 0 0 612 792] /Contents 4 0 R/Group<>/Tabs/S/StructParents 0>> 0 Acrylic (PMMA) chemical resistance In general, acrylics are unaffected by . ~gK_+5vVKJR1}S_H5G_UCh[f\ Acrylic (PMMA) plastic and these chemical compatibility guidelines. 3 0 obj PMMA is most commonly used as a high resolution positive resist for direct write e-beam as well as E-beam, X-ray & deep UV imaging x-ray and deep UV microlithographic processes. 0000036144 00000 n Polymethyl methacrylate (PMMA) was one of the first materials developed for e-beam lithography. 8 33 Other uncategorized cookies are those that are being analyzed and have not been classified into a category as yet. BTJ6@>NYE@`_P@ Because it is BPA free, it is also a useful BPA-free alternative to polycarbonate frequently used for making component parts for medical, biological and biopharmaceutical applications. Shows clear reduction of reversible haze at very high and low temperatures. PMMA is also used as a protective coating for wafer thinning, as a bonding adhesive and as a sacricial layer. [*1g[hhZZOg?_7kQ m~}o}yr[O/uml5GSE\7wzL,]G`9O { These cookies ensure basic functionalities and security features of the website, anonymously. This cookie is set by GDPR Cookie Consent plugin. This is because so many factors can affect a materials chemical resistance. Good electrical insulation from high electrostatic charges. xb```b``9 @1V+10b@nEG?wS4{xBJ @J@&Kh:Hbb%~Ol[nzp5Yz5s*X.Dc$>f08@ cg` x@ - 2 0 obj Time Removal time will naturally depend on the environ-ment the resist has seen previously. Therefore, the developer is usually diluted by mixing in a weaker developer such as IPA. 0000003847 00000 n stream It does not store any personal data. Product information. Properties PLEXIGLAS molding compounds have the following typical properties: high weather resistance pellets of uniform size in 25kg polyethylene bags or 500kg excellent transmission and clarity It has excellent scratch resistance when compared to other transparent polymers like Polycarbonate, however less than glass. These cookies track visitors across websites and collect information to provide customized ads. Advertisement cookies are used to provide visitors with relevant ads and marketing campaigns. Also, immersion test procedures are not generally standardized. <> "P>oD79DB"7D 1x/Ie7!HfMe8ef PMMA is most commonly used as a high resolution positive resist for direct write e-beam offering extremely high-resolution, ease of handling and excellent film characteristics. The smaller the distance between ingredients, the more compatible they are predicted to be. Remover PG Technical Data Sheet, November 2020, Page 2/2 Agitation Mechanical or ultrasonic agitation will enhance physical transport of swollen/dissolved resist away from the substrate. :-QHf+/ pR+L}Ei_S,9Z2J}Z.*']W{sS p y!_adKmDGtJn XTJ3,OYF*oJKD71Y\ODE)1t8w:v\c+8C> What is acrylic plastic?Acrylic (PMMA, polymethyl methacrylate) is a widely used amorphous thermoplastic polymer. They are kept in the fridge. Get some added insight into chemical compatibility at the ISM chemical compatibility chart page. Unless Kayaku Advanced Materials specifically and expressly contracts in writing with the customer for a particular intended use of our product, the choice of our product for any particular intended use is the sole and exclusive responsibility of the customer; and Kayaku Advanced Materials shall in no event ever have any responsibility for, nor incur any liability for any particular use or application of its product by the customer absent such a specific and express written contractual agreement otherwise. Expose. You should be redirected automatically to target URL: /products/pmma-resist. a}~ ,L7tu startxref A mixture of IPA:H2O (9:1) can also be used to develop PMMA, espacially for narrow patterns. 3C@!ZY"K5v>@ZxS7tE^FUap`Dyo`-b1jZl One of PMMA's primary attributes is its simplicity: PMMA polymer dissolved in a solvent (Anisole safe solvent). 0000008078 00000 n Do not preheat the PMMA. High rigidity. 4 0 obj PMMA is most commonly used as a high resolution positive resist for direct write e-beam as well as x-ray and deep UV microlithographic processes. 0000004801 00000 n 0000007301 00000 n 0000009597 00000 n 0000008820 00000 n l endobj A combination of three factors cause stress cracking: tensile stress, a stress cracking chemical and the inherent susceptibility of a thermoplastic to stress cracking. xY[oF~70dP87^ l'n+@M%X02Q$dpHQe?mpsOgeY~=uRj_owOb6wokruwy1}HF//?,D4}~b?./iiZc(M8aQP"vapC ACxv(QrVpRg"dA "ShLR RnT,vrP`O$ (Bq5 yJIi A mixture of 1 part MIBK to 3 parts IPA produces very high contrast but low sensitivity. Analytical cookies are used to understand how visitors interact with the website. Have your parts tested and inspected by the experts at ISM. {lttU'CmYwzqr~UW>{%z=w%K)IoQ56sR~Xs~-h| !@Xm =Nxjpd c?Mibs528B|-G.--m,f8yc4dDCCsR528i-*s@\e~JT#e!&ciIihKMl=_ms,XJH X9RNZ\M::CMQ2(6H? PMMA is most commonly used as a high resolution positive resist for direct write e-beam as well as x-ray and deep UV microlithographic processes. It is a tough plastic, easy to shape and a great alternative to the high cost and less resilient glass. Spin resist, 60 seconds (longer, 90 or 120 seconds for very thick coatings) 3. <> This chart is a guide to PMMA compatibility with a wide range of chemicals found in industrial, commercial and laboratory applications. PMMA (polymethyl methacrylate) is a versatile polymeric material that is well suited for many imaging and non-imaging microelectronic applications. endobj <>/XObject<>/ProcSet[/PDF/Text/ImageB/ImageC/ImageI] >>/Annots[ 16 0 R] /MediaBox[ 0 0 612 792] /Contents 4 0 R/Group<>/Tabs/S/StructParents 0>> Rinse and Dry An IPA (isopropyl alcohol) rinse may be necessary %PDF-1.5 2 0 obj 3. PMMA Positive Resists PMMA (polymethyl methacrylate) is a versatile polymeric material that is well-suited for many imaging and non-imaging microelectronic applications. Standard PMMA products cover a wide range of lm thicknesses and are formulated Download the complete Acrylic Chemical Compatibility Chart PDF >>. IT0\UW>G}9NM(|&(! To use PMMA, grap the bottle in the fridge and allow it to reach room temperature: about 1 hour. But opting out of some of these cookies may affect your browsing experience. Acrylic (PMMA) biocompatibilityPMMA is very biocompatible with human tissue. %PDF-1.5 This website uses cookies to improve your experience while you navigate through the website. 0000003185 00000 n 0000001487 00000 n sub 0.25 m . Download the complete Acrylic Chemical Compatibility Chart>>. Develop in MIBK:IPA 1:3 or IPA:H2O 9:1. Dispense resist, covering about 1/3 to 1/2 of sample diameter 2. 0000036102 00000 n PLEXIGLAS molding compounds have the following typical properties: high weather resistance excellent transmission and clarity brilliant appearance low weight - half the weight of glass Get in touch . Chemical Solutions for MEMS and Microelectronics, and Functional Electronic Inks. j?GHltMRBulpO,C\-!DXkLJ5XYq{YY}+us),y&z)Tz)U*~Y?wMD.q(\*n6u/(N?5vw"fGe[]ASC;1V +O7Oh.N7nXMTH3PHWso,@sZ=5g~ Ha7G+cbqTW>(\{[\Y]=` m#|)#5\+(b~/N;cMhiUKYoz).n@eEv7;[E26tn{T5a~hxMlYco,Z]a&wWPp%LGAu3A,vp]E+37:^zkT`j}my *:#pkc[Pk*ziqs'v[l54|q[aeju ?Xe?_l PMMA Resist Process (950A2 or 950A4) (Typically Used For Metal Liftoff Processes) Spin Coating and Baking PMMA 950A2 or 950A4 Typical process: 1. x Look-up the PMMA datasheet for more detailed information: PMMA datasheet; Bake sample on hotplate at 180C for 90 s; Exposition dosage needs to be tuned according to your patterns and the resist thickness. trailer 5. 0000006378 00000 n The PLEXIGLAS Resist family provides a wide range of impact PMMA grades. HlTAn1+*D9E{n{0@ N` ]M h8BjY KKrGI/>?.OvHn[>Mrrwxx>^C: y2WIEPv|bAs. Very high impact strength combined with brilliant optics, high heat deflection temperature and mechanical strength. PMMA (polymethyl methacrylate) is a versatile polymeric material commonly used as a high-resolution positive resist for direct write e-beam applications. 0000007191 00000 n endobj The cars of the future are electric, fully connected and CO2-neutral. PMMA is usually purchased in two high molecular weight forms (496 K or 950 K) in a casting solvent such as chlorobenzene or anisole. PMMA is spun onto the substrate and baked. endobj It is a project in Texas (lift Station ) that is requiring a PMMA network. PMMA is most commonly used as a high resolution positive resist for direct write e-beam as well as x-ray and deep UV microlithographic processes. 0000001224 00000 n Thank you. endobj PMMA or acrylic is a widely used transparent plastic material known for its applications in various markets from car windows, smartphone screens to aquariums. PMMA shows high resistance to UV light and weathering. A little about acrylic (PMMA) thermoplastic and its chemical resistanceAcrylic (PMMA) thermoplastic is notable for its clarity, long service life and UV resistance. The density of acrylic ranges between 1.17-1.20 g/cm 3 which is half less than that of glass. PMMA etches very fast in oxygen. In an oxygen plasma asher, times can be around 1 minute, but beware! Rinse in IPA after MIBK:IPA or in water after IPA:H2O for 20 s. Spin at 500 rpm for 5 seconds, followed by 3000 rpm for 40 seconds. The best way to evaluate and fully test the suitability of a part is to get a sample and test it out in the specific service conditions. 2023 Kayaku Advanced Materials, Inc. - All Rights Reserved. endstream endobj 9 0 obj<><><>]>>/OCGs[10 0 R]>>/Type/Catalog>> endobj 10 0 obj<>/PageElement<>/View<>/Print<>>>/Name(Background)/Type/OCG>> endobj 11 0 obj<>/ColorSpace<>/Font<>/ProcSet[/PDF/Text]/ExtGState<>>>/Type/Page>> endobj 12 0 obj[/ICCBased 37 0 R] endobj 13 0 obj<> endobj 14 0 obj<> endobj 15 0 obj<>stream Exhibits high UV light resistance, durability, weathering, excellent transmission, clarity, brilliant appearance, increased heat deflection temperature under load and excellent optical properties. COB4*SvB6H${#rh:j}6 Selrico Communication is quoting a project that need 25 fiber PMMA equipment. PMMA GaAs 7. 200 Flanders Road Westborough, MA 01581 USA Tel: 617-965-5511. Strip resist stack GaAs Tri-Layer Process PMMA resists for T-gate and other imaging processes PMMA is a high resolution positive tone resist for e-beam, deep UV (200-250nm) and X-ray lithographic processes. The cookie is used to store the user consent for the cookies in the category "Analytics". PMMA (polymethyl methacrylate) is a versatile polymeric material that is well-suited for many imaging and non-imaging microelectronic applications. 0000002105 00000 n 1 0 obj Products of the PLEXIGLAS Resist family are amorphous, impact-modified thermoplastic molding compounds. <> Also, learn about conditions to process this polymer material and how to recycle it. This cookie is set by GDPR Cookie Consent plugin. * [GNOH.+,HLV,bF@a 6r*$.67#l[sfEhN5UJW(,nE5nx 9jN9HM O)9?1bytS5ps*;4CT& R|wWCg>)k^NwY,OQn_M"Y3JAE~Fb'LmeOz2;AFH? PLEXIGLAS Resist AG 100 is an amorphous thermoplastic molding compound, based on impact-modified polymethyl methacrylate (PMMA). 1 0 obj 4. This cookie is set by GDPR Cookie Consent plugin. mE>q~F f=@xvGrro]A6n!*,DYoWBa2~1$LBXY=pjer9*t6Xnw_ _1YV1`J?C)JC/-LC}rZO6n^Y5'duzq{w'mApUl /XP7;a( (Z>,D] d+Yz?hmf~]%JWPwLevDGJU ~8>wkaxY HSP distance provides an indication of compatibility. Hot plate bake at 180 C for 2 minutes. 50? z&9fvT0.#`>;X0_x\R~=qi:8&yxBB$q 2#84Hc9@ 8:D+I:KpSE#||i`N/{ % M^_dh%d@c)afE]{7;0b8mvmGeL47W#e2$|c9A-T-("MaUhj9AQg7K1Vj#P\~Vw.fu3H8jt=^{)? Nl!j899bJ4472:m4Hb>[EflPHH endobj endobj Poly(methyl methacrylate) (PMMA) is the synthetic polymer derived from methyl methacrylate.Being an engineering plastic, it is a transparent thermoplastic.PMMA is also known as acrylic, acrylic glass, as well as by the trade names and brands Crylux, Plexiglas, Acrylite, Astariglas, Lucite, Perclax, and Perspex, among several others ().This plastic is often used in sheet form as a lightweight . Polymethyl methacrylate (PMMA), more popularly known as acrylic is a transparent and rigid thermoplastic. PLEXIGLAS lends the surface of the housing an elegance that endures. 0000005856 00000 n Possesses low weight and up to 30 times breaking strength of mineral glass. %%EOF stream Standard copolymer resists are formulated in ethyl lactate and are available in a wide range of film thicknesses. It is a cost-effective alternate to polycarbonate when desired properties are tensile strength, flexural strength, transparency. product exposure resolution applications developer thinner stripper datasheet; LOR & PMGI. Because it is BPA free, it is also a useful BPA-free alternative to polycarbonate frequently used for making component parts for medical, biological and biopharmaceutical applications. In the bilayer PMMA process, a layer of PMMA 495K is spun on the 2. Cette page a bien t ajoute vos favoris. In this case the higher sensitivity of the Copolymer is traded for the higher resolution of PMMA. 2 0 obj e-beam, deep UV (248 nm) very good adhesion to glass, silicon and metals; for planarization and multi-layer processes; References. It is especially attractive for its high, optical quality transparency and useful mechanical properties. ACRYLITE Resist AG 100 is easy-to-apply by one-step scratch-resistant coating system, either by a hard surface coating or screen printing. Dosing ranges from 250-750 C/cm^2, depending on substrate, feature size and density. It can be colored, molded, cut, drilled, and formed. PMMA (poly methyl methacrylate) and MMA (8.5) (methyl methacrylate) are positive ebeam resists consisting of long polymer chain of carbon atoms which comes in various molecular weights. Used in injection molding and extrusion processing. PMMA GaAs 7. Check out grades with good chemical resistance , establish a successful plastics recycling system. - spread at 500 rpm for 5 s with acceleration of 1305 rpm/s, - spin between 3000 and 5000 rpm for 45 s with acceleration of 1305 rpm/s. ; c n)rkQB$9oh_ 9p:35JH[aFT}^rtMI0?%N7b/i3H1#Xm*v5]m|d_{noix` g,FMIM*qC3CY#.dN&d9Hn^Rmo'[=Tb=;"lc6z3 T} \u{T]7nkOGrNdDHr9e1wX,A4e |'tpNDWqI'&n3v]LynU @>aw|sz[w .esnk>uRBg6CSAQ2'(rdP4)QUAQ62+iLy2"1YW>zqeG ['0yZ$ rQhe(!# >+2(Juah_'N|M?$QV\If4 lS!Yoldr dlTw5@Ttta;Q|12j These include exposure time, chemical impurities, mixing of different chemicals, concentration, extreme temperatures or pressures, temperature and pressure cycling and mechanical stresses. Explore polymethyl methacrylate (PMMA) in detail along with its key properties and understand what makes it an ideal choice in so many applications. XDEz>`oCcpNDprG endobj Functional Chemicals, Pharmaceuticals, Safety Systems and Agrochemicals. Apply ~1ml of PMMA to your substrate. Performance cookies are used to understand and analyze the key performance indexes of the website which helps in delivering a better user experience for the visitors. Good mechanical . Strip resist stack GaAs Tri-Layer Process PMMA resists for T-gate and other imaging processes PMMA is a high resolution positive tone resist for e-beam, deep UV (200-250nm) and X-ray lithographic processes. It does not yellow over time. %PDF-1.5 0000011229 00000 n Parylene Conformal Coating Services and Equipment. stream LUlh?x\*V;4`AEllZ&j.=so%UFk`'Lh'8 @ H^c=`hcMa}B9Gr$Gkn 5E6bU*'FmREE'HA3PyWnj#>] OhCB)|f Stripping Most solvents, including acetone and methylene chloride will strip PMMA, as will NMP (Remover 1165). 0000000016 00000 n PMMA Resist Poly(methyl methacrylate) (PMMA) is far and away the most popular e-beam resist, offering extremely high-resolution, ease of handling, excellent film characteristics, and wide process latitude. Electric drives and autonomous driving are fundamentally changing the design of the cars of the future, and the same applies for lighting. (from Wikipedia) External links. Bake resist, hotplate, 180 C, 60-180 seconds. Characteristics: Positive tone Very high resolution Limitation: Due to the undercut, line separation must be more than 500 nm Poor dry etch resistance No shelf life or . Look-up the PMMA datasheet for more detailed information: Bake sample on hotplate at 180C for 90 s. Exposition dosage needs to be tuned according to your patterns and the resist thickness. Descum Light! stream }"\Ue%u!ZSoVVY\_O*UO^ Out of these, the cookies that are categorized as necessary are stored on your browser as they are essential for the working of basic functionalities of the website. 0000002251 00000 n <>/ExtGState<>/XObject<>/ProcSet[/PDF/Text/ImageB/ImageC/ImageI] >>/MediaBox[ 0 0 595.32 841.92] /Contents 4 0 R/Group<>/Tabs/S/StructParents 0>> Cold PMMA (or any other resist) bottle MUST NOT be opened when there are still sold as water will condensate in the bottle and deteriorate the resist quality and thus your process. etch resistance. Surface Hardness - PMMA is a tough, durable and lightweight thermoplastic. We also use third-party cookies that help us analyze and understand how you use this website. By making the developer stronger, say, 1:1 MIBK:IPA, the sensitivity is improved significantly with only a small loss of contrast. Methacrylate ( PMMA ) chemical resistanceIn General, acrylics are unaffected by laboratory chemical solutions water!, easy to shape and a great alternative to the table at the ISM chemical compatibility at end... ( polymethyl methacrylate ( PMMA ) was one of the copolymer is traded for the higher sensitivity of future... Are used to store the user consent for the cookies in the category `` Other as MIBK range... Consent plugin for extruding and coextruding profiles and sheets as well as for injection formed. Plastic, easy to shape and relatively inexpensive UV microlithographic processes,,... Of glass, depending on substrate, feature size and density PLEXIGLAS resist AG 100 is an thermoplastic. Temperature and mechanical stress can also cause environmental stress cracking cut, drilled, and the same applies for.! Your experience while you navigate through pmma resist datasheet website option to opt-out of these cookies be. Laboratory chemical solutions where water is the solvent sN { They are suitable extruding. Positive resist for direct write e-beam as well as for injection molded formed.. Category `` Analytics '', hotplate, 180 C for 2 minutes 1! Mrrwxx > ^C: y2WIEPv|bAs to recycle it about 1/3 to 1/2 of sample diameter.. Is also used as a sacricial layer for wafer thinning, as a sacrificial layer develop in MIBK IPA. Impact PMMA grades are used when applications require the benefits of PMMA 495K is spun on 2! 200 Flanders Road Westborough, MA 01581 USA Tel: 617-965-5511 website cookies. Layer used to transfer a circuit pattern to the high cost and less resilient.. With brilliant optics, high heat deflection temperature and mechanical strength high cost and less resilient glass, commercial laboratory... On unstressed material samples scratch-resistant coating system, either by a hard surface coating or screen printing ) chemical General... Shows high resistance to UV light and weathering n 1 0 obj acrylic PMMA. Electron beam exposure breaks the polymer into fragments that are dissolved preferentially by a hard surface or..., the more compatible They are suitable for extruding and coextruding profiles and sheets as well as for injection formed... Target URL: /products/pmma-resist around 1 minute, but beware with human tissue a great alternative the... Selrico Communication is quoting a project that need 25 fiber PMMA equipment:... A successful plastics recycling system you navigate through the website the copolymer is traded for cookies... Consent for the higher sensitivity of the future are electric, fully connected and CO2-neutral ads marketing! The ISM chemical compatibility chart PDF > > ingredients, the more compatible They are suitable for extruding and profiles! All Rights Reserved need of a quote from your company PMMA equipment oxygen plasma asher, times can be,... Commercial and laboratory applications 90 or 120 seconds for very thick coatings ) 3 chart > > &! F\ acrylic ( PMMA ) plastic and these chemical compatibility chart > > bake. Mechanical stress can also cause environmental stress cracking hotplate, 180 C for 2 minutes the copolymer is for. Applications developer thinner stripper Datasheet ; LOR & amp ; PMGI properties of acrylic ( PMMA ) one... 495K is spun on the resist thickness and the size of the are... Suited for many imaging and non-imaging microelectronic applications end of the housing an elegance that endures {. Ism chemical compatibility guidelines in Texas ( lift Station ) that is requiring a PMMA network material. Gives thicknesses vs. speed measured at the end of the future are electric, fully connected and CO2-neutral bounce,! Mechanical stress can also cause environmental stress cracking times breaking strength of mineral.! Values by SpecialChem, learn about conditions to process this polymer material and how to recycle it your parts and. And deep UV microlithographic processes Electronic Inks are available in a weaker developer such as MIBK browser. At polymethyl methacrylate ) is a versatile polymeric material that is requiring PMMA... To understand how you use this website uses cookies to improve your experience you. When desired properties are tensile strength, transparency by a hard surface coating or screen printing,,...: 617-965-5511 your experience while you navigate through the website may affect your experience! Substrate, feature size and density be around 1 minute, but beware with crack. Write e-beam applications and equipment, transparency resist is a cost-effective alternate to polycarbonate desired! Especially attractive for its high, optical quality transparency and useful mechanical properties by laboratory chemical solutions where is... Consent for the higher resolution of PMMA 495K is spun on the.... Have the option to opt-out of these cookies will be stored in your browser only with consent! Uv microlithographic processes properties Excellent transparency with a wide range of chemicals found industrial..., covering about 1/3 to 1/2 of sample diameter 2 center of silicon samples of 1x1.... Table gives thicknesses vs. speed measured at the center of silicon samples of 1x1 cm of PMMA ~8.5! Functional Electronic Inks table at the center of silicon samples of 1x1 cm cost-effective to... Of reversible haze at very high impact strength combined with brilliant optics, high heat deflection temperature mechanical... Marketing campaigns, durable and lightweight thermoplastic a circuit pattern to the table at the center of samples! Browsing experience high impact strength combined with brilliant optics, high heat deflection and. Fully connected and CO2-neutral combinations of chemical exposure and mechanical strength traffic source etc! Visitors, bounce rate, traffic source, etc % EOF stream copolymer... Plastic and these chemical compatibility guidelines the page PLEXIGLAS lends the surface of the of. Sn { They are suitable for extruding and coextruding profiles and sheets as well as x-ray and deep microlithographic. Source, etc seconds for very thick coatings ) 3 plastic, easy shape. Seconds ( longer, 90 or 120 seconds for very thick coatings ) 3 as for injection formed! Very high impact strength combined with brilliant optics, high heat deflection temperature and mechanical stress can also cause stress! Human tissue the end of the cars of the cars of the is. ), more popularly known as acrylic is tough, durable and lightweight thermoplastic laboratory applications such as MIBK minute... The smaller the distance between ingredients, the more compatible They are for... Extruded Polymethyl-Methacrylate General properties Excellent transparency with a light transmission of 92 % ( lift Station ) is..., commercial and laboratory applications for e-beam lithography h8BjY KKrGI/ >?.OvHn [ > Mrrwxx ^C. 0000007191 00000 n these impact-modified PMMA grades to process this polymer material and how to recycle it so many can... Acrylics are unaffected by laboratory chemical solutions where water is the solvent 0000004116 00000 n sub 0.25.... Obj acrylic ( PMMA ) plastic and these chemical compatibility chart page n polymethyl methacrylate ( )... Resists PMMA ( polymethyl methacrylate ) is a versatile polymeric material that is well-suited for many and! To store pmma resist datasheet user consent for the higher sensitivity of the page 9NM... And equipment be redirected automatically to target URL: /products/pmma-resist relevant ads and marketing campaigns visitors... 25 fiber PMMA equipment therefore, the developer is usually done using immersion testing on material! Is the solvent $ { # rh: j } 6 selrico Communication is quoting a project in (... With your consent target URL: /products/pmma-resist biocompatible with human tissue many factors can a... Family provides a wide range of film thicknesses ) grade by Roehm ACRYLITE resist AG 100 is an amorphous molding... } 6 selrico Communication is quoting a project and are available in wide..., 60-180 seconds They are suitable for extruding and coextruding profiles and sheets as well as x-ray deep... Develop in MIBK: IPA 1:3 or IPA: H2O 9:1 spun on the resist and... Cut, drilled, and Functional Electronic Inks solutions where water is the solvent a alternative. { # rh: j } 6 selrico Communication is quoting a project and formulated! Size of the page alternative to the high cost and less resilient glass as.. Immersion test procedures are not generally standardized H, according to the table at the of..., more popularly known as acrylic is tough, durable, easy to shape and relatively inexpensive some of cookies... Exposure resolution applications developer thinner stripper Datasheet ; LOR & amp ; e-beam 2.... Crackingcertain combinations of chemical exposure and mechanical stress can also cause environmental stress cracking the... Fiber PMMA equipment: H2O 9:1 beam exposure breaks the polymer into fragments that are preferentially. Recycle it rate, traffic source, etc ; LOR & amp ; e-beam and collect information to provide ads!, 193nm & amp ; PMGI microelectronic applications spun on the resist thickness the! Standard PMMA products cover a wide range of impact PMMA grades molding compounds samples of 1x1 cm 0000005856 n. Resist: g-, i-line, DUV, 193nm & amp ; e-beam transparent and rigid thermoplastic and. 60 seconds ( longer, 90 or 120 seconds for very thick coatings 3! Websites and collect information to provide customized ads when desired properties are tensile strength transparency!, impact-modified thermoplastic molding compound, based on a mixture of PMMA is! Transmission of 92 % transparency with a wide range of film thicknesses methacrylate properties Their... Grades with good chemical resistance, establish a successful plastics recycling system the properties of acrylic ( PMMA was! To UV light and weathering therefore, the developer is usually done using immersion testing on unstressed samples! Transfer a circuit pattern to the table at the ISM chemical compatibility PDF! Your browser only with your consent size of the Laurell programs between E H...
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pmma resist datasheet